An electromagnetic indirect-driving scanning mirror for wide-field coaxial LiDAR applications
Li, Shuangliang Wang, Di Song, Dezhen Zou, Jun
Li, Shuangliang
Wang, Di
Song, Dezhen
Zou, Jun
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Department
Robotics
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Conference proceeding
Date
2025
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English
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Abstract
This paper reports an electromagnetic indirect-driving scanning mirror with an enlarged mirror plate (17???? × 17????) supported by high-strength polymer hinges for wide-field coaxial LiDAR (Light Detection and Ranging) applications. An indirect-driving mechanism was developed to achieve large tilting angle through mechanical amplification, while maintaining a relatively high resonance frequency of the enlarged mirror plate. A prototype mirror was designed, fabricated, and tested. A Hall scan position sensor was integrated to monitor the pose of the mirror in real time. The testing results show a coupled resonance frequency of 54.9 ???? with an optical tilting angle of ±60°, corresponding to a field of view (FoV) of 120°. A wide-field coaxial LiDAR setup was also built based on the indirect-driving scanning mirror, and 2D imaging was demonstrated.
Citation
S. Li, D. Wang, D. Song, and J. Zou, “An electromagnetic indirect-driving scanning mirror for wide-field coaxial LiDAR applications,” https://doi.org/10.1117/12.3039809, vol. 13382, pp. 102–110, Mar. 2025, doi: 10.1117/12.3039809.
Source
MOEMS and Miniaturized Systems XXIV
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SPIE